JPH0326478Y2 - - Google Patents
Info
- Publication number
- JPH0326478Y2 JPH0326478Y2 JP1983058435U JP5843583U JPH0326478Y2 JP H0326478 Y2 JPH0326478 Y2 JP H0326478Y2 JP 1983058435 U JP1983058435 U JP 1983058435U JP 5843583 U JP5843583 U JP 5843583U JP H0326478 Y2 JPH0326478 Y2 JP H0326478Y2
- Authority
- JP
- Japan
- Prior art keywords
- stage
- direction moving
- substrate
- convex portion
- moving member
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Landscapes
- Details Of Measuring And Other Instruments (AREA)
- Microscoopes, Condenser (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5843583U JPS6033685U (ja) | 1983-04-19 | 1983-04-19 | 傾角ステージ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5843583U JPS6033685U (ja) | 1983-04-19 | 1983-04-19 | 傾角ステージ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6033685U JPS6033685U (ja) | 1985-03-07 |
JPH0326478Y2 true JPH0326478Y2 (en]) | 1991-06-07 |
Family
ID=30188713
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5843583U Granted JPS6033685U (ja) | 1983-04-19 | 1983-04-19 | 傾角ステージ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6033685U (en]) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2869977B2 (ja) * | 1988-09-06 | 1999-03-10 | 日本電気株式会社 | 半導体集積回路の断面観察用治具 |
KR101193532B1 (ko) * | 2010-10-26 | 2012-10-19 | 송무헌 | 핸들몸체의 방향이 편중된 스테이지 |
JP6401979B2 (ja) * | 2014-09-04 | 2018-10-10 | オリンパス株式会社 | 顕微鏡システム |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS533807U (en]) * | 1976-06-29 | 1978-01-13 |
-
1983
- 1983-04-19 JP JP5843583U patent/JPS6033685U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6033685U (ja) | 1985-03-07 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JPS6175336A (ja) | 立体カメラ | |
JPH0326478Y2 (en]) | ||
JP2931342B2 (ja) | 光走査装置における結像レンズ保持装置 | |
US7088505B2 (en) | Microscope and focusing device for a microscope | |
US20100170015A1 (en) | Scanning probe microscope capable of measuring samples having overhang structure | |
JPS6255767B2 (en]) | ||
JPS5810040A (ja) | レ−ザ光線走査機構 | |
JPS6054151A (ja) | 電子線装置の試料移動装置 | |
JP2520950Y2 (ja) | 二光束干渉用対物レンズ | |
JP2539541B2 (ja) | 電子顕微鏡試料傾斜装置 | |
JPS5948509B2 (ja) | 電子顕微鏡等の試料傾斜装置 | |
JP2006170957A (ja) | チルトステージ | |
JPH043294Y2 (en]) | ||
JPH0343648Y2 (en]) | ||
JPH11248719A (ja) | 変位拡大装置およびこれを用いた微小領域走査装置 | |
JPS5832196Y2 (ja) | 電子顕微鏡等用試料ホルダ−軸受構造 | |
JPS63127218A (ja) | 光線変向ミラ−の方向調整装置 | |
JPH08161756A (ja) | 光ディスク装置の対物レンズ位置決め機構 | |
JP2001504241A (ja) | 後付け可能な鏡筒中間部材 | |
JPH0232602B2 (en]) | ||
JPH0497209A (ja) | 物体の保持機構 | |
JPS6244452Y2 (en]) | ||
JPS62136743A (ja) | 電子顕微鏡等の絞り装置 | |
JPH0825135B2 (ja) | ワ−ク支持装置 | |
JPS61223531A (ja) | ミクロトーム用光学的観察装置の取付装置 |